Chromatic Dispersion Profilometry

Chromatic dispersion height measurement
 AND IMAGING SERVICES

Also known as FRT Chromatic Dispersion Profilometry or Chromatic Confocal Microscopy

Chromatic dispersion height measurement is a surface metrology technique for non-contact and non-destructive characterization of almost all surfaces and films for measurements such as roughness, profiles, topography and film thickness. 

INDUSTRIES & APPLICATIONS WHERE FRT IS COMMON:

Thin films development, semiconductors, MEMS, optical components, coatings and magnetic materials are common uses chromatic dispersion analyses.

MEASUREMENTS MADE VIA Chromatic dispersion:

  • Measuring Tasks
    • Roughness
    • Step Height
    • Film Thickness
    • Profile
    • Wear Volume
    • 3D Map
    • Roll-off Amount
    • TTV
    • Thickness
    • Waviness
    • Bow
    • Membrane Bow
    • Layer Stacks
    • Defect Size
    • Topography
    • Angle
    • Warp
    • Vias / TSV
    • Bumps
    • Flatness
    • Critical Dimension
    • Slope
    • Radius of Curvature
    • Grain Size
    • Coplanarity
Chromatic White Light Sensor Measures Height

Uses & Limitations of Chromatic Dispersion:

  • What our FRT services are great for:
    • Large (or small) area 3D surface topography measurement (flatness, roughness, etc.)
    • Large (or small) area transparent film thickness mapping
  • Limitations:
    • Measurement of surfaces with steep slopes or curvature
    • Cannot measure opaque film thicknesses

Related Techniques:

Depending on the exact problem you are trying to solve and data desired, potential related techniques are:
Our technical team is happy to clarify on what technique will provide you with the best data.

INSTRUMENTS USED FOR
Chromatic dispersion height measurement

FRT MicroProf 200

 

Maximum sample size:
x,y: 200 mm
z: 37 mm

 

Maximum Z Rangex.y Resolutionz Resolution
3 mm1-2 microns90 nm
1 mm5-6 microns30 nm
300 microns1-2 microns9 nm
100 microns1-2 microns3 nm

Maximum measurable surface curvature:
60 degrees