Composition and Density Analysis in OLED Devices Using Micro-RBS
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Toray Research Center possesses the world’s first introduced high-spatial-resolution RBS system. Accurate composition and density evaluation of a small area can be realized by using a high-energy micro-ion-beam. The composition and density analysis of the IGZO layer in the flexible OLED device and Ir quantification in the emission layer are shown in this white paper.