Adventures in Wavelength Dispersive X-ray Fluorescence (WDXRF): Flexible Element Analysis for Thin Films and More

While many materials scientists and engineers have heard about energy-dispersive x-ray spectroscopy techniques, fewer experts know about the unique advantages and applications of their sister technique, wavelength-dispersive x-ray fluorescence spectroscopy (WDXRF). Both methods measure elemental composition by analyzing the intensities of characteristic x-ray photons; however, WDXRF achieves higher peak resolution, fewer spectral interferences, and lower background noise. What’s more, WDXRF’s precision makes it suitable for modelling and computing material thickness and composition with the fundamental parameter (FP) method.

In this webinar, you will find out how WDXRF enables these analytical advantages and explore ways it can be used in thin film and bulk material optimization and quality control. Guest speaker Meredith Beebe from Rigaku will be breaking down the fundamentals of WDXRF and will showcase examples of its use in solving manufacturing challenges with photovoltaics, semiconductors, and other advanced materials and devices.

This Webinar Will Answer:

  1. Why does peak resolution matter in elemental analysis? How does WDXRF achieve a peak resolution substantially greater than EDXRF?
  2. How does WDXRF compare with energy-dispersive x-ray spectroscopy thin film analysis?
  3. How are WDXRF composition measurements made? How can WDXRF be used to analyze film thickness?
  4. What kinds of problems can WDXRF solve? In what industries is it most relevant?
  5. What makes the Rigaku AZX 400 WDXRF instrument at Covalent unique?

A Powerhouse Technique You May Have Overlooked

Several practical considerations make Energy Dispersive X-ray Fluorescence (EDXRF) instruments prominent in industrial laboratories: they are less expensive, consume less physical space, and typically permit faster sample preparation. However, an over-reliance on energy-dispersive techniques often leads teams to overlook the significant upsides of wavelength-dispersive alternatives.

WDXRF systems have low background noise (as low as 1/10th the background intensity of peaks in EDXRF), improved interference removal, and up to ~10-20 times better peak resolution. Their high precision has made WDXRF systems the gold-standard in metallurgy and geological applications and important metrology tools for thin film research and manufacturing.

Today, partnering with an analytical services lab can negate the logistical limitations of one method over the other. Join this webinar to examine the key pros and cons of WDXRF as compared with EDXRF, so you can make the best choice for your next elemental analysis project.

About the Speakers

Meredith Beebe

Meredith Beebe is a semiconductor X-ray metrology specialist with unique perspective having significant experience both as an end user in the fab as a process characterization engineer and as an applications expert for multiple vendors supporting customers with a broad range of technological challenges. Meredith has worked in the semiconductor industry for over 20 years and is a subject matter expert known across the industry for trace metal and contamination analyses employing X-rays, VPD-ICP-MS, SIMS, AFM, and Auger.

Meredith’s role with Rigaku’s Semiconductor Metrology Division, as an applications scientist specializing in XRF and TXRF, provides a platform to address ever-changing metrology demands for yield improvement and advanced device development.

Meredith helps Rigaku customers to understand and develop improved strategies for contamination monitoring, metrology optimization, and she provides key insights from direct customer experience to contribute to Rigaku’s leadership in X‑ray metrology.

About Covalent Metrology
Covalent Metrology is a disruptive analytical services laboratory and platform based in Sunnyvale, California. Its mission is to help companies who use advanced materials to get better data and insights more easily and affordably to facilitate faster development and production. Covalent is dramatically changing the characterization and imaging landscape by combining transparent pricing, data platforms, and top-notch customer service with world-class scientists, state-of-art tools, and strategic partnerships.

Covalent now has over 500 customers in 30+ industries.

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