SEM EDS

ENERGY DISPERSIVE X-RAY SPECTROSCOPY (SEM-EDS) SERVICES

Energy Dispersive X-ray Spectroscopy (known as EDS, EDX, EDXS) can be coupled with SEM to generate composition maps: EDS relies on the interaction of a source of X-ray excitation and a sample to determine local elemental composition. The surface of the sample can be scanned with resolution comparable to that of SEM (although not as high) to produce a composition map.

MEASUREMENTS COMMON WITH SEM-EDS:

  • Surface imaging
  • Elemental composition (spots and mapping)

EXAMPLE OUTPUTS OF SEM-EDS:

SEM-EDS

INSTRUMENTS WE USE FOR SEM-EDS:

FEI Helios Nanolab 600i with Oxford 80mm SDD: Elemental data can be collected in Spectral, Line Scan and Mapping modes.

Hitachi 4700 with EDAX EDS

FEI Helios Hydra PFIB with ThermoFisher Pathfinder 100mm SDD: Elemental data can be collected in Spectral, Line Scan and Mapping modes.