Energy Dispersive X-Ray Spectroscopy (SEM-EDS) Services
Energy Dispersive X-ray Spectroscopy (known as EDS, EDX, EDXS) can be coupled with SEM to analyze the chemical makeup of a sample.
EDS relies on the principle of x-ray fluorescence, which is produced by one type of interactions between the applied electron beam and the sample surface. When inelastic interactions occur, an x-ray photon is excited and emit from the sample with an energy characteristic of the species of the atom that produced it. Specialized detectors collect these photons as the applied electron beam is scanned over the sample, to yield chemical information on a pixel-by-pixel basis. The surface of the sample can be thus be scanned with resolution nearly comparable to that of SEM (not quite as high) to produce a semi-quantitative compositional spectrum.
- Elemental composition determination at specific points or areas on the sample
- Mapping of elemental distribution within a sample: in 1, 2, or 3 dimensions
- Phase analysis of multimodal materials
Instruments we use for SEM-EDS:
Nearly all our SEM instruments are outfitted with an EDS detection system:
FEI Helios 600i uses an Oxford 80mm SDD EDS detector
FEI Quanta 200 uses a Thermo Fisher Scientific high-speed 30mm SDD EDS detector
Hitachi 4700 uses an EDAX EDS detector
Zeiss Ultra-55 uses an Oxford 10mm SDD EDS detector
Thermo Fisher Scientific PFIB G4 UXe uses Thermo Fisher’s Pathfinder 100mm SDD EDS detector