SEM / SCANNING ELECTRON MICROSCOPY SERVICES
SEM, FIB-SEM, SEM-EDS
Scanning Electron Microscopy is used in a broad array of techniques to characterize materials and devices as well as to prepare samples for characterization by other techniques. Covalent has broad capabilities in SEM & HR SEM, wide area SEM, CD-SEM, defect review SEM, SEM-EDX and FIB-SEM. For a high-level summary of our SEM related services, please refer to the table below.
Contact us with any questions regarding our scanning electron microscopy (SEM) services.
|SEM Technique||Typical Measurements|
|SEM & HR-SEM||SEM enables measurement and imaging of sample surfaces to a resolution of ~10nm|
High-resolution SEM utilizes a mono-chromatic, thermal field-emission electron gun, to achieve imaging resolution down to sub-nm scale on ideal sample types
|SEM & FE-SEM||Related techniques to ascertain particle size, feature dimensions, surface imaging, sample structure,etc.|
Top-down and cross-sectional variants.
|CD-SEM||To measure defect size, layer thickness, surface roughness, etc.|
|Defect Review SEM||To image a specific sample site for defects.|
|FIB-SEM||Combines the imaging capabilities of an SEM, with an extra column that utilizes a focused beam of ions to mill/remove material, at site-specific locations.|
Top down and cross-sectional variants.
|SEM-EDS||Combines SEM with energy dispersive X-ray Spectroscopy to generate composition maps.|