Wide Area 3D Patterned Light Measurement (VR)
Wide Area 3D / Patterned Light measurements (also called “VR,” due to a popular instrument used in this method) encompass a class of optical profilometry techniques used to visualize the surface topography of large-sized samples.
- Greatest scan area among optical profilometry techniques (cm scale)
- High vertical resolution ( limit < 5 um) with balanced lateral resolution ( ~5 um)
- Non-destructive analysis
- Contour and warp will affect surface roughness analysis
- Highly transparent or specular reflective surfaces
- High aspect ratio dimensions that block the light source