Particle Counting (SP1 / sp3) by SurfScan

Surfscan particle counting is one of the most efficient ways to quantify the number of particles dispersed across the surface of an unpatterned wafer substrate. It is an optical, non-contact surface characterization technique developed for advanced quality assurance and rapid detection of wafer defects.

In a Surfscan system, deep ultraviolet (DUV) laser beam is applied to the wafer surface and scanned to generate an image. A detector reads out the number of other defects such as scratches or clouded areas. At the same time, the system generates a 2D map of the location and intensities (e.g. approximate scale) of the tallied features.

What Surfscan is great for:

  • Particle counting
  • Quality assurance for incoming / outgoing wafers
  • EUV resist and scanner qualification
  • Advanced substrate defect distribution / quantification

Example Output 

Sample map of surface quality with enhanced contrast. Particles identified are color coded based on intensity / height.
Image Credit: KLA Tencor


KLA Tencor SurfScan Models SP1 / SP3
Unpatterned Wafer Inspection System

KLA is the industry leader in unpatterned wafer inspection tools. Both the SP1 and SP3 incorporate a DUV laser source with peak power control and varied spot size options with fully integrated analytical capabilities under normal and oblique illumination. To facilitate optimized throughput, the system includes an auto-loader under vacuum that enables precision handling of wafers up to 12″. To capture more advanced defect analyses, both tools include a built in SURFmonitor module which simultaneously maps surface quality and sub micron-scale defects, allowing for overlaid review of all wafer surface flaws.