FIB SEM

FOCUSED ION BEAM SEM (FIB-SEM) SERVICES

A FIB/SEM tool is a tool combining a FIB (focused ion beam) source along with the capabilities of a standard SEM. The FIB-SEM can be used for imaging samples where the electron beam contrast mechanisms do not work well.  Frequently, FIB-SEM is used to cut into a sample allowing for cross-sectional analysis of structure and composition by other characterization techniques, such as TEM or EDX.

EXAMPLE OUTPUTS OF FIB-SEM:

Cross section of display (FIB-SEM): this cross section reveals the structure of pixels in fine detail.

INSTRUMENTS WE USE FOR FIB-SEM:

FEI Helios 600i: designed for samples 150mm (6 inches), or less in diameter.  High-definition FE-SEM, with imaging resolution down to 0.8nm. This instrument utilizes high-field immersion optics, and stage biasing to provide improved resolution.

FEI Helios Hydra Plasma-FIB: The Helios Hydra PFIB the highest current ion beam microscope on the market. The PFIB column is equipped with Xe, Ar, N, and O ion beam sources, and is able to produce up to 2.5uA of beam current (~50x greater than traditional Ga systems.) The ability to operate at high currents, allows for milling depths on the order of ~1mm; a 10-fold improvement over Ga ion beam columns. The PFIB is a reliable strategy to prepare TEM samples, without Ga+ ion implantation artifacts. Advanced analysis packages also enable for 3-D volume reconstruction, and correlative microscopy. The electron column on the Hydra PFIB is one of the highest resolution SEM columns on the market.  This instrument is equipped with a mono-chromatic, field-emission gun, drift–correction, and stage biasing, allowing for 0.5nm imaging resolution.