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NanoSIMS Analysis of BMD in Silicon Wafer

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NanoSIMS analysis of boron dopant profile in silicon wafer for precise dopant concentration measurement by Covalent Metrology.

The NanoSIMS 50L can provide the highest lateral resolution among secondary ion mass spectrometers and can simultaneously achieve high sensitivity and high mass resolution. Here, we introduce examples of measuring oxygen precipitates in silicon wafer.

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About Covalent Metrology

Covalent Metrology is a disruptive analytical services laboratory and platform based in Sunnyvale, California. Its mission is to help companies using advanced materials and nanoscale devices accelerate product development with deeper insights and better analytical data. Covalent offers comprehensive solutions and services that integrate state-of-the-art lab infrastructure, world-class experts in a wide array of analytical techniques, and modern data management and analysis.

Covalent now has over 500 customers in 30+ industries.

Learn more at: https://covalentmetrology.com