Glow Discharge Optical Emission Spectroscopy (GDOES)
Glow discharge optical emission spectroscopy (GDOES) is a quantitative, chemical analytical technique used to study the elemental composition of solids. It is particularly well suited for analysis on thin- and thick-film samples, or for depth-profiling of multilayer film stacks.
Strengths
- Accepts both conductive and insulating materials
- Faster data collection and depth profiling than mass spectroscopy techniques
- Reduced mass interferences improve compositional accuracy for low-mass elements
- One tool for surface, depth profile, and bulk analysis
- Can detect light elements such as H, C, N, O that methods like ICP-MS cannot detect
Limitations
- Lower sensitivity for trace elements as compared to GDMS
- Requires more extensive calibration for accurate quantification with matrix effects