Nanoscale Secondary Ion Mass Spectrometry (NanoSIMS)
Nanoscale secondary ion mass spectrometry (NanoSIMS) is a highly sensitive chemical analysis technique for acquiring 2D and 3D maps of elemental distribution information with exceptionally high spatial and mass resolutions. It is typically used to produce images of elemental concentration.
Covalent partners with Toray Research Center to offer NanoSIMS on one of only about 50 instruments for this technique available worldwide.
- 1D (line-scan), 2D and 3D element maps can be collected
- High mass resolution for isotope analysis
- Elemental sensitivity much better than EDS or XPS for trace element analysis
- Relatively low depth resolution (10-15 nm) compared to other SIMS methods due to the higher primary ion accelerating energy in NanoSIMS
- Quantitative analysis requires reference sample(s) to be prepared