Wavelength Dispersive X-ray Fluorescence Spectroscopy (WDXRF)

GST thin film used in phase-change random access memory devices (PRAM), deposited by ALD; film was analyzed using both ED-XRF and WD-XRF to show comparable peak resolution between the techniques.

Wavelength dispersive x-ray fluorescence spectroscopy (WDXRF) is a non-contact, non-destructive technique used to measure elemental composition, elemental concentration per unit area, and film thickness. Due to its acute element sensitivity, it is particularly useful for identifying trace elements.

Strengths

Able to detect all elements present in a sample with atomic number > 4
Highest element sensitivity among XRF techniques, enables identification of trace elements
Rapid, straightforward measurement with semi-quantitative concentration measurements

Limitations

High-precision element quantification can only be achieved with calibrated standards

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Example Outputs Instruments Used How WDXRF Works

Sample Requirements

Sample diameter: up to 400 mm
Sample thickness / height: up to 50 mm
Sample mass: up to 30 kg

WDXRF Example Outputs

GST thin film used in phase-change random access memory devices (PRAM), deposited by ALD; film was analyzed using both ED-XRF and WD-XRF to show comparable peak resolution between the techniques.

WDXRF high-resolution element scans for W/Co multi-layer stack, qualitatively showing total decomposition of W outer-layer after 2 etch cycles.

WDXRF Instruments Used

Rigaku AZX 400

Detected element range: ⁴Be to ⁹²U
Measurement range:
- SC: 5° to 118°
- F-PC: 13° to 148°
Maximum scan speed: 1400° / min (2theta)
Angle reproducibility: within 0.0005°
Continuous scan speed: 0.1° to 240° per minute
Analyzing crystals:
- Standard: LiF (200), Ge, PET, RX25
- Optional: LiF (220), RX4, RX9, RX35, RX40, RX45, RX61, RX75
Diaphragm: Automatic 7 positions exchanger w/ attenuator
X-ray tube: Rh target, maximum rating: 4 kW
X-ray high voltage generator: High-frequency inverter system
- Maximum rating: 4 kW, 60 kV-150 mA
- Stability: ± 0.0005% (with 10% input variability)

View Instrument Brochure

In a WDXRF measurement, the sample is irradiated with high-energy monochromatic X-rays. This irradiation stimulates the emission of characteristic X-rays associated with elements present in the material.

WDXRF spectrometers use Bragg diffraction from crystals within the instrument to produce wavelength-separated peaks, each associated with a specific element. This yields semi-quantitative, and quantitative (if calibrated), information about the elements present in the sample matrix and their atomic ratios.

Unlike EDXRF, WDXRF has excellent light element detection capability.

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