Attenuated Total Reflectance (ATR)
$99 Base price Go to quote listChromatic Dispersion Profilometry
Chromatic dispersion profilometry is a non-contact, nondestructive analytical technique used to measure surface topography. It is particularly well suited for large area characterization (e.g. full wafers) requiring high vertical accuracy.
- High vertical accuracy (within a few hundred nm for mapping, or as low as single nm for point scan)
- Able to measure large sample areas (up to 200mm x 200mm in house; 300mm+ available at a partner facility)
- Captures 3D height map of full surface curvature, warp, and flatness
- Effective at characterizing interfacial topographies through transmissive overlayers
Limitations
- Slower data collection for high lateral resolution mapping as compared to other surface topography methods
- Thickness measurement of transparent / translucent films only possible under certain conditions
- Stage translation artifacts (typically a few hundred nm) limit ability to measure extremely flat surfaces
- Difficulty measuring steeply sloped surfaces (>30°)
- Changes in sample reflectivity (particularly if wavelength dependent) can affect the measurement.
Base Prices
Technique Variants
Pricing Starts At
Action
Example Outputs
3D surface map of a US 1 cent coin showing overall concave shape as well as topography of individual surface features
Surface profiles taken from the above 3D surface scan of a US 1 cent coin
3D FRT Model showing bowing in topography of an 8-in standard wafer
3D FRT Model generated of an assembled SMD device, showing both surface texture and larger-scale components.
From: Danfoss Silicon Power GmbH
Sample Requirements
- Maximum Sample Size:
- In-house Instrument: 200 mm x 200 mm
- Partner Lab Instrument: 415 mm x 305 mm
- Maximum Measurable Height Range:
- Single-Scan: 3 mm
- Z-Stitching of Multiple Scans: approximately 22 mm
- Maximum Sample Weight: 5 kg
Instruments Used for CDP
FRT MicroProf 200
- Maximum Sample Dimensions: 200 mm x 200 mm
- Height Measuring Range (single-scan): 300 µm to 3 mm
- Maximum Lateral Resolution: 2.5 µm
- Repeatability: < 0.000009 x Z-Measuring Range
How CDP Works
Chromatic dispersion profilometers employ a confocal optical configuration in which a broadband white-light beam is focused downward onto a point area of the sample using a lens with intentionally large optical dispersion. The lens causes focal length to vary with wavelength, such that different wavelengths will be in focus at different distances from the detector.
Only the narrow band of wavelengths which are in focus at the sample surface are reflected back to the detector, allowing the system to measure surface height at the illuminated point with nm-scale vertical accuracy.
Additionally, the large-area sample stage can also translate (move) laterally to allow the measurement lens to analyze surface height at a series of points. This enables 2D or 3D modeling and mapping of surface topography across a full scanned region on the sample.
Additional Resources
No resources available at this time.
Similar Techniques
+
Add to Comparison
Atomic Force Microscopy (AFM)
In Material Property Analysis
Base Price: $225 / Image
AFM measures surface topography and certain material properties with sub-nm vertical resolution and atomic-level force sensitivity.
+
Add to Comparison
Advanced Optical Microscopy (VH Microscope)
In Failure Analysis
Base Price: $225 / Hour
Optical microscopy is ubiquitous in diverse fields within academic research and commercial industries. It is an affordable, rapid...
+
Add to Comparison
Laser Scanning Confocal Microscopy (LSCM)
In Microscopy & Imaging
Base Price: $300 / Hour
Laser scanning confocal microscopy (LSCM) is a nondestructive technique which generates 2D and 3D images of a sample...
+
Add to Comparison
Scanning Electron Microscopy (SEM)
In Failure Analysis
Base Price: $275 / Hour
Scanning electron microscopy (SEM) is a surface imaging technique capable of achieving nm resolution on topographical features. Additionally,...
+
Add to Comparison
White Light Interferometry (WLI)
In Microscopy & Imaging
Base Price: $225 / Hour
White light interferometry (WLI) is a nondestructive, non-contact, optical surface topography measurement which uses coherence scanning interferometry to...
+
Add to Comparison
Wide Area 3D Patterned Light Measurement (VR)
In Failure Analysis
Base Price: $275 / Hour
Wide Area 3D Patterned Light measurements encompass a class of optical profilometry techniques used to visualize the surface...
✕
Comparison link sent successfully
✕
Please use valid email address
✕
You need to have at least 2 techniques to compare
✕
You can select maximum 5 techniques
Covalent uses cookies to improve your browsing experience and to help you access the most relevant information and services efficiently. To learn more, view our
