Microelectronics Wafer

Surface Characterization Solutions for Semiconductor Applications

In this workshop, we focus on the mechanical and chemical properties of material surfaces relevant to semiconductors and related applications. The program comprises an introductory seminar to gain insights into the analytical methods for measuring zeta potential (surface charge), hardness, elasticity, and adhesion, followed by a practical session using the corresponding instruments and dedicated samples.

Read More: Zeta Potential

The zeta potential is a fundamental characteristic of the solid-water interface. It represents surface and interfacial charge. Despite of a common theoretical background, the analytical methods for the zeta potential analyses differ significantly for particle dispersions (by electrophoretic light scattering) and solid material surfaces (by streaming potential).

The analysis of the surface zeta potential serves versatile applications. In this workshop, we focus on case studies relevant for semiconductor processing and related fields.

Read More: Nanoindentation

Nanoindentation is a surface characterization technique used for measuring the mechanical properties of materials such as hardness, modulus, viscoelasticity, creep, and fracture toughness. Nanoindentation, unlike conventional mechanical testing techniques, is particularly useful for characterizing the properties of complex materials such as composites, thin films and coatings, and soft materials such as hydrogels. In this workshop, we will focus on how nanoindentation can be applied to the semiconductor industry to evaluate coating deposition process, coating quality, bonding pads characterization, etc.

Read More: Nano-scratch Testing

Scratch testing is another surface characterization technique used to evaluate the cohesive and adhesive properties of thin films to determine the failure points of the film-substrate system. Of particular significance to the semiconductor industry is controlling the adhesion among passivation layers, the underlying layer, and/or the semiconductor wafer to mitigate premature delamination and ultimate component failure. In this workshop, we will focus on how scratch testing can be employed for cohesion and adhesion testing of semiconductor materials.

9:15 AM


9:45 AM

Welcome and Introductions

10:00 AM

Presentation 1: The complementarity of solid surface and liquid phase zeta potential: Focus on semiconductor applications
Anton Paar Speaker: Thomas Luxbacher, PhD

10:45 AM

Presentation 2: Nanoindentation and Nano-scratch: Focus on semiconductor applications
Anton Paar Speaker: Parth Kotak, PhD

11:30 AM

Presentation 3: Complementary techniques for surface and interface characterization
Covalent Speaker: to be announced

12:00 PM

Catered Lunch Break

1:00 PM

Hands-on Demonstrations: Measurement of Nanoindentation, Nano scratch, and Zeta potential
Thomas Luxbacher, PhD, and Parth Kotak, PhD

4:00 PM

End of Workshop

Thomas Luxbacher, PhD
Principal Scientist

Anton Paar GmbH, Graz, Austria

Thomas Luxbacher is the principal scientist for surface charge and zeta potential at Anton Paar. Prior to his present role, he was a product manager for surface zeta potential analyzers for more than 15 years. Before joining Anton Paar, Thomas gained experience in the semiconductor and automotive businesses. He received his MSc and PhD degrees in Physical Chemistry from Graz University of Technology.

Parth Kotak, PhD of Anton Paar

Parth Kotak, PhD
Application Scientist

Anton Paar USA, Torrance, CA

Dr. Parth Kotak works as an Application Scientist with a focus on Mechanical Surface Characterization at Anton Paar USA. He received his Ph.D. in Mechanical Engineering from the University of Iowa in 2023. His research activities focused on the mechanical characterization of soft elastomers and polymer fibers for soft robotics applications and evaluation of the mechanical properties of Transition metal dichalcogenides (TMDs) for energy storage devices and flexible electronics.