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Scanning Electron Microscopy (SEM)

Scanning Electron Microscopy Main Image
Top-down image of spherical nanoparticles and aggregates grown on silicon substrate
LIVE VIEW

Scanning electron microscopy (SEM) is a surface imaging technique that achieves nanometer-scale resolution: orders of magnitude smaller than is possible with optical microscopy.

In addition to standard SEM detectors, all Covalent instruments are also outfitted with energy dispersive spectroscopy (EDS) detectors to capture quantitative elemental composition measurements, as well as 2D elemental maps, alongside conventional SEM images.

Strengths

  • Top-down or cross-section imaging with nm- resolution
  • Sub-nm resolution possible; see ‘high resolution’ technique variant
  • Multimodal morphology characterization of surface or subsurface features

Limitations

  • Specimen damage can occur during imaging

Learn More

Example Outputs Instruments Used How SEM Works

Scanning Electron Microscopy Services

Example Output 5259

Scanning Electron Microscopy

Scanning electron microscopy (SEM) is a surface imaging technique that achieves nanometer-scale resolution: orders of magnitude smaller than is possible with optical microscopy.

In addition to standard SEM detectors, all Covalent instruments are also outfitted with energy dispersive spectroscopy (EDS) detectors to capture quantitative elemental composition measurements, as well as 2D elemental maps, alongside conventional SEM images.

Sample Requirements

Example Outputs

Example Output 1

Top-down image of spherical nanoparticles and aggregates grown on silicon substrate

From: Center for Advanced Materials Analysis in Oregon
Example Output 2

SEM-EDS Map of elemental distribution across a battery electrode cross-section.

Instruments Used

ThermoFisher Scientific Helios 5 UC (x3)

ThermoFisher Scientific Helios 5 UC (x3)

  • Maximum Horizontal Field Width: 2.3 mm at 4 mm WD
  • Electron Beam:
    • Resolution Limit: 0.7 nm at 1 kV
    • Current Range: 0.8 pA to 100 nA
    • Accelerating Voltage Range: 350 V to 30 kV
  • Ion Beam
    • Resolution Limit: 4.0 nm at 30 kV using preferred statistical method
    • Current Range: 1 pA to 100 nA
    • Accelerating Voltage Range: 500 V to 30kV
View Instrument Brochure
Thermo Scientific Scios

Thermo Scientific Scios

  • Powerful charge neutralization
  • Enables analysis on magnetic samples
  • Able to operate above vacuum pressure
JEOL JSM-IT800 SHL - Schottky Field Emission Microscope

JEOL JSM-IT800 SHL - Schottky Field Emission Microscope

  • Versatile electromagnetic/electrostatic hybrid lens design for outstanding imaging and analysis performance
  • NEOENGINE – intelligent automated electron beam control
  • Advanced auto functions including beam alignment, focus, and stigmation
  • In-lens field emission gun
  • Aperture Angle Control Lens (ACL) for superb resolution at any kV or probe current
  • Beam Deceleration (BD) mode reduces effects of lens aberrations at the sample
  • Large specimen chamber with multiple ports
  • Montage images and elemental maps
  • Smile View Lab for data management and report generation
  • Live Analysis with integrated JEOL EDS elemental screening
  • High spatial resolution imaging and analysis of nanostructures
View Instrument Brochure

How SEM Works

To generate electron images – called micrographs – a highly focused electron beam is scanned over the surface of a specimen. As it scans, the beam interacts with the sample to produce several detectable signals (different types of photons and electrons) through elastic and inelastic scattering events.

The intensities of these signals depend predominantly on the atomic number of the scattering atom, and the adjacent surface topography. Each signal is affected by these factors slightly differently, and the SEM can be calibrated to detect one or two signals at a time.

As the electron beam is scanned, the active detector(s) measure the intensity of the selected signal(s) at each pixel, and correlate these to a grayscale value.

When the scan is complete, the system outputs an image that captures topographical (and sometimes relative atomic number) information.